节流阀
所有的聚四氟乙烯(POCL3)
ATV1000全铁氟龙节流阀
ATV1000全聚四氟乙烯节流阀用于控制真空室的压力。
ATV1000全聚四氟乙烯(节流阀)设计与GPC3000(自动压力控制器)兼容。
特别是广泛用作半导体工艺制造设备的放电装置,其特点是它是一种POCL液体。
功能和优势
■ATV1000全聚四氟乙烯(节流阀)采用微步进电机和直接齿轮驱动器,提高了阀门的分辨率。
可以半永久使用。
■ATV1000全聚四氟乙烯(节流阀)可与贵公司提供的GPC3000控制器配套使用,也可与其他公司产品的控制器配套使用。
■ATV1000全聚四氟乙烯(节流阀)采用聚四氟乙烯材料制造,因此是专门无污染的。
Throttle Valve
All Teflon(POCL3)
ATV1000 All Teflon Throttle Valve
The ATV1000 All Teflon Throttle Valve is used to control the pressure in the vacuum chamber.
ATV1000 All Teflon (Throttle Valve) is designed to be compatible with GPC3000 (Auto Pressure Controller).
In particular, it is widely used as a discharge device for semiconductor process manufacturing equipment, characterized in that it is a POCL liquid.
Features & Benefits
■ ATV1000 All Teflon (Throttle Valve) uses Micro-Stepping Motor and Direct Gear Driver to improve the resolution of the valve.
Can be used semi-permanently.
■ ATV1000 All Teflon (Throttle Valve) can be used in connection with the GPC3000 Controller provided by your company, and you can also connect and use the controllers of other companies' products.
■ ATV1000 All Teflon (Throttle Valve) is made of Teflon material, so it is specialized from pollution.
Product

Specifications
Speed (open to close)
|
2.0 sec
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Resolution
|
1/24000
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Drive Method
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Direct gear drive
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Valve Motor Ambient
Operating Temperature
|
-20 to +40
|
Differential Pressure
Across Valve
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1 atm. (15psig) max.
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External Leakage at Shaft seal
|
1x10-8sec/sec He
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Materials Exposed to Process
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PTFE, PEEK, Viton
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Compatible Controller
|
Model GPC3000
MKS Type 651, 1651
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Size
|
i inch Teflon join
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Full Closed Leak (100mmH2O)
|
3 l/min
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